HORIBA SEC-Z500X Series Digital Mass Flow Controller

Basic product information

Product series: SEC-Z500X digital mass flow controller (MFC), SEF-Z500X is a mass flow meter (MFM).

Application scenario: Precise control of gas flow in semiconductor manufacturing processes.

Environmental certification: RoHS compliance, restricting 6 harmful substances such as lead and mercury.

Production and Service: Headquartered in Kyoto, Aso factory in Japan, and dual base production in the United States, with technical support provided by global branches.

Core performance indicators

Key performance parameters

Control accuracy flow rate>25% F.S.: ± 1.0% S.P; ≤25% F.S.：±0.25% F.S.

Response speed full range * * ≤ 1 second * * (variable PID system)

Linear compensation fifth degree polynomial curve compensation

Leakage rate ≤ 5 × 10 ⁻¹² Pa · m ³/s (He)

Repeatability ≤± 0.2% F.S

Working temperature 5~50 ℃ (recommended 15~45 ℃)

Working pressure difference of 50~300 kPa (d); Large caliber model 100~300 kPa (d)

Pressure resistance 1000 kPa (g)

Wetting material 316L stainless steel (polished)

Core functional advantages

Multi gas and multi range adjustable

Users can change the gas type and full-scale flow rate on site without disassembling the gas and pipeline.

The dedicated configuration software supports one click selection of MR/MG numbers, reducing spare parts inventory and costs.

High precision calibration

Calibration using NIST traceable standard flow system.

Built in massive process gas characteristic database, suitable for toxic and volatile gases.

High speed control

Equipped with a variable PID algorithm, the full range set point response reaches 1 second, which is better than traditional analog models with a response time of 3-5 seconds.

Communication and Monitoring

Supports three types of industrial buses: RS-485/DeviceNet/EtherCAT.

EDiagnostic software enables real-time monitoring, warning, and logging, and supports preventive maintenance.

Model and Interface

Model rule: SEC=Controller; SEF=flow meter; The number represents the range; 2=Digital/Analog, 4=DeviceNet, 7=EtherCAT; MGX=Multi Gas Multi Range Version.

Range coverage: 0.5 SCCM~500 SLM (N ₂ conversion).

Valve type: normally open O/normally closed C.

Standard interface: 1/4 inch, 1/2 inch VCR; Optional 1.125/1.5-inch IGS.

Power Supply: Digital/Analog * * ± 15V DC * *; DeviceNet/EtherCAT type 24V DC.

Software and Systems

Configuration software: Windows system adaptation, on-site modification of gas, range, address and other parameters.

Monitoring software: Supports LAN/TCP/IP, single server monitoring of multiple devices, abnormal alarm and data recording.

Communication wiring: RS-485 uses RJ45; Simulate using D-Sub 9-pin; DeviceNet uses miniature shielded connectors.

Key questions and answers

Question 1: What are the core advantages of SEC-Z500X compared to traditional simulated MFC?

Answer: The core advantages are full range ≤ 1 second high-speed response (variable PID), on-site multi gas/multi range adjustable without disassembly, ± 1.0% S.P. higher accuracy, support for digital bus communication and eDiagnostic preventive monitoring, and RoHS compliance, significantly reducing spare parts and maintenance costs.

Question 2: What are the accuracy indicators and applicable conditions of SEC-Z500X?

Answer: There are two levels of accuracy – ± 1.0% S.P. when the flow rate * *>25% F.S; When the flow rate is ≤ 25% F.S., it is ± 0.25% F.S; Calibration has NIST traceability * *, compensates for linearity through a fifth degree polynomial, adapts to various process gases in semiconductors, and meets SEMI standards for accuracy.

Question 3: What communication methods does SEC-Z500X support, and which models and interfaces do they correspond to?

answer:

Digital/Analog (RS-485): Model with 2 (such as SEC-Z512MGX), RJ45+D-Sub 9-pin interface, speed 38400 bps;

DeviceNet: Model with 4 (such as SEC-Z514MGX), compliant with ODVA standards, powered by 24V DC;

EtherCAT: Model with 7 (such as SEC-Z517MGX), compliant with ETG standards, dual RJ45 ports.