Leybold THERMOVAC TTR 91/96/911/916 N series vacuum transmitter

​Product positioning and core advantages

This series is a MEMS Pirani solid-state Pirani vacuum transmitter, designed for measuring medium and low vacuum. Its core advantages include:

MEMS solid-state sensing: earthquake resistant, impact resistant, and gas resistant

Temperature independent compensation: stable measurement and high repeatability

Installation without directional restrictions, stainless steel sturdy shell

360 ° LED circular indicator light, clear status at a glance

Optional display screen, digital interface, anti-corrosion coating, long tube baking type

Model and version differentiation

Model Characteristics Interface/Configuration

TTR 91 N basic type, no switch analog output

TTR 91 SN with 2-channel switch simulation+relay

TTR 96 N coating anti-corrosion simulation+2-way switch

TTR 911 (C/S) N digital interface type EtherCAT/Profibus/RS232

TTR 916 N display+coated display screen+anti-corrosion

C version: Sensor with * * Parylene HT ®**  Coating, corrosion-resistant gas

S version: with relay switch point

Interface: FCC68/RJ45

Core technical parameters

Measurement performance

Parameter indicators

Measurement range 5.0 × 10 ⁻⁵ mbar~atmospheric pressure

Measurement principle MEMS Pirani heat conduction

Typical accuracy of 1 × 10 ⁻³~100 mbar: ± 5%; 100 mbar to atmospheric pressure: ± 25%

Repeatability 1 × 10 ⁻³~100 mbar: ± 2%

Analog output 0~10 V DC (logarithmic output)

Output formula Vout=log ₁₀ (P) × 1.286+6.143

Resolution/Refresh 16 bit/100 Hz

Electrical and Environmental

Parameter indicators

Supply voltage 9-30 V DC

Power consumption<1.2 W

Relay capacity 1 A @ 30 V AC/DC (resistive)

Pressure resistance of 6 bar

Working temperature: 0-40 ℃

Storage temperature -20~65 ℃

Maximum baking temperature 85 ℃ (non working state)

Protection level IP40

Dead volume 2.80 cm ³ (DN16 ISO-KF)

Weight approximately 170 grams

Function and Configuration

status indicator

360 ° LED ring light: real-time display of sensor status

Optional LCD touch screen display: displays pressure, units, parameters, and status

Switch output

Up to 3 relays, used for process control and alarm

Setting range: 2.7 × 10 ⁻⁴~1000 mbar

Digital interface (high-end version)

EtherCAT、RS232、Profibus

Easy to connect to PLC and automation systems

special edition

Long tube type: supports higher baking temperatures

Anti corrosion coating type (C): suitable for corrosive process gases

Typical applications

Analytical instruments, research and development laboratories

Vacuum drying, pre pump vacuum monitoring

Ionizing gauge/UHV gauge controlled activation

Industrial process control, general vacuum system

Key issues

What sensing technology does the TTR 91/96/911/916 N series use and what are its advantages compared to traditional Pirani?

Answer: Adopting MEMS Pirani solid-state Pirani technology; The advantages are earthquake resistance, impact resistance, air release resistance, faster response, higher accuracy, more stable temperature compensation, installation not affected by location, and more suitable for harsh industrial environments.

What is the analog output type of this series of transmitters, and what is the corresponding relationship between the calculation formula and the range?

Answer: The output is a logarithmic voltage signal of 0-10V; Calculation formula: Vout=log ₁₀ (P ₘᵦₐᵣ) × 1.286+6.143, covering a range of 5 × 10 ⁻⁵ mbar to atmospheric pressure.

What are the core differences and applicable scenarios between the C version and the regular version?

Answer: The C version sensor has Parylene HT on the surface ®  Anti corrosion coating, capable of withstanding corrosive/reactive gases; The regular version is only suitable for clean gases; The C version is more suitable for harsh process environments such as semiconductors, coatings, and chemicals.