Oerlikon Leybold Vacuum TURBOVAC series turbo molecular pump operation guide

Product Overview

Brand: Oerlikon Leybold Vacuum

Series: TURBOVAC 35 LS~1000C

Structure: Oil lubricated bearings, turbo molecular pump structure

Essential accessories: TURBOTRONIK frequency converter, front stage vacuum pump

Special model: C-type equipped with bearing/motor blow air protection

Safety precautions

Mechanical risk

High speed rotors have enormous kinetic energy, and it is prohibited to operate without flanges and without load

If the pump body gets stuck, it will generate a large torque, and the flange needs to be tightened according to the specified torque

Electrical risk

The connection between the pump and the frequency converter can reach up to 400V, and maintenance must be completely powered off

Only specified frequency converters and connecting wires can be used

heat risk

Operating temperature * *>70 ℃ * *, there is a risk of burns, and protective isolation is required

Medium risk

Standard non withdrawable corrosive/dusty gas

Type C needs to be used in conjunction with purging gas to handle corrosive gases

Standard type cannot be used in explosion-proof areas

Core technical parameters (key models)

Model Speed (N ₂) L/s Extreme Vacuum mbar Start Time (min) Weight (kg) Maximum Power Consumption (VA) Front Stage Flange

35 LS/LS2 25/32 ＜5×10⁻⁸ 2 2 45 16 KF

50 33~55 ＜5×10⁻⁸ 2 2 45 16 KF

151/151C 145 ＜1×10⁻¹⁰ ≈2 8 680 25 KF

361/361C 345 ＜1×10⁻¹⁰ ≈2 12 680 25 KF

600C 560 ＜10⁻¹⁰ 3 12 680 40 KF

1000C 850~1100 ＜10⁻¹⁰ 4 25 680 40 KF

Installation requirements

environmental conditions

Environmental temperature: ≤ 55 ℃

Magnetic field limit: 5~7mT, excessive shielding is required

Vacuum chamber connection

High vacuum flange: KF/ISO-K/CF/ANSI

Tightening torque: 15~50Nm, according to specifications

Fragment protection cover must be installed

Front stage pump connection

Supporting TRIVAC series front-end pump

Install anti backflow valve and adsorption trap

Cooling connection

Air cooling: Leave a ventilation space of * * ≥ 20cm * * around the fan

Water cooling: water pressure of 3-7bar, flow rate of 30-80L/h, water temperature of 5-35 ℃

Blow and release air

C-type must be connected to N ₂/Ar inert blowing gas

Optional power-off automatic vent valve

Run operation

start

Start the front-end pump first and turn on the molecular pump after reaching the starting pressure

Simultaneously activate the cooling system

bake

CF flange type can be * * ≤ 100 ℃ * * baked

Avoid direct heat radiation from the rotor

shutdown

First turn off the molecular pump → turn off the front stage pump → blow for 1 hour (corrosive gas) before stopping the machine

Synchronize cooling shutdown to prevent condensation

deflate

Air can be released through high vacuum side/front stage side/purge valve

The boosting speed follows the curve and excessive pressure is prohibited

Maintenance and upkeep

Bearing replacement

35~361C: 15000 hours

600C/1000C: 10000 hours

clean

Mild pollution: Vacuum baking cleaning

Heavy pollution: return to factory for disassembly and cleaning

Dismantling and Storage

Thoroughly blow and deflate before disassembly

Seal the flange, place the desiccant, and store it in a PE bag

Troubleshooting

Unable to start: Check power supply, frequency converter, front-end pressure, motor cables

Vacuum degree not up to standard: system leakage, pump body contamination, insufficient capacity of the front stage pump

Overheating: Insufficient cooling, high ambient temperature, excessive load

Vibration noise: bearing damage, rotor imbalance, system resonance

Key questions and answers

What is the core difference between the C-type and standard type of TURBOVAC series molecular pumps?

Answer: The C-type is equipped with a purge gas interface, which can introduce N ₂/Ar inert gas into the bearing and motor cavity, and can handle corrosive/reactive gases; The standard type can only draw air or inert gas and cannot handle corrosive media.

What are the cooling requirements and selection criteria for this series of pumps?

Answer: Small models (35/50) ≤ 30 ℃, can be naturally cooled under high vacuum; When the ambient temperature is high, baking, and high load, air cooling is required; Models 151C and above, high-temperature environments, and continuous high loads must be water-cooled. Water cooling requires a water pressure of 3-7 bar and a flow rate of 30-80 L/h.

What are the core maintenance cycles and prohibited operations for the pump body?

Answer: Core maintenance: Bearings must be replaced after 10000~15000 hours, and blowing air filters must be replaced every 1~6 months; Prohibited operations: Unauthorized personnel are prohibited from disassembling the pump body, modifying rotor components, and operating without debris protective covers.